학술논문
Scandium-doped aluminum nitride photonic integration platform
Document Type
Conference Paper
Author
Source
In: Proceedings of SPIE - The International Society for Optical Engineering , Integrated Optics: Devices, Materials, and Technologies XXVIII. (Proceedings of SPIE - The International Society for Optical Engineering, 2024, 12889)
Subject
Language
English
ISSN
1996756X
0277786X
0277786X