학술논문
Micro-Torr Vacuum Packaging of Gettered Ceramic Chip Carriers
Document Type
Conference Paper
Source
In: INERTIAL 2019 - 6th IEEE International Symposium on Inertial Sensors and Systems, Proceedings , INERTIAL 2019 - 6th IEEE International Symposium on Inertial Sensors and Systems, Proceedings. (INERTIAL 2019 - 6th IEEE International Symposium on Inertial Sensors and Systems, Proceedings, April 2019)
Subject
Language
English