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Reduction of mechanical losses in ion-beam sputtered tantalum oxide thin films via partial crystallization

Document Type

Article

Author

Favaro, G.; Milotti, V.; Alonso Diaz Riega, D.; Busdon, N.; Bazzan, M.; Granata, M.; Hofman, D.; Michel, C.; Pinard, L.; Conti, L.; Capaccioli, S.; Shcheblanov, N.S.; Lemaître, A.; Martinez, V.; Cagnoli, G.; Piergiovanni, F.; Fabrizi, F.; Pelizzo, M.G.; Corso, A.J.

Source

In: Classical and Quantum Gravity. (Classical and Quantum Gravity, 16 May 2024, 41(10))

Subject

Language

English

ISSN

13616382
02649381

Online Access

Full Text (IOP Science) Full Text (IOP) Web of Science JCR 저널정보 Scopus Find it@PNU

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