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Determination of elastic parameters of Si 3 N 4 thin films by means of a numerical approach and bulge tests

Document Type

Article

Author

Tinoco, H.A.; Holzer, J.; Chlupová, A.; Kruml, T.; Hutař, P.; Pikálek, T.; Buchta, Z.; Lazar, J.

Source

In: Thin Solid Films. (Thin Solid Films, 28 February 2019, 672:66-74)

Subject

Language

English

ISSN

00406090

Online Access

Full Text (ScienceDirect 종량제) Web of Science JCR 저널정보 Scopus Find it@PNU

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