학술논문
Design and simulation of push–pull capacitive accelerometer structure for navigation applications
Document Type
Conference Paper
Author
Source
In: Springer Proceedings in Physics , The Physics of Semiconductor Devices - Proceedings of IWPSD 2017. (Springer Proceedings in Physics, 2019, 215:913-917)
Subject
Language
English
ISSN
18674941
09308989
09308989