학술논문
MOEMS Fabry-Pérot interferometer with point-anchored Si-air mirrors for middle infrared
Document Type
Article
Author
Source
In: Journal of Micromechanics and Microengineering . (Journal of Micromechanics and Microengineering, 1 September 2014, 24(9))
Subject
Language
English
ISSN
13616439
09601317
09601317