학술논문
Fabrication of Polymer Membrane-Suspended Microstructures on Printed Circuit Boards
Document Type
Article
Author
Source
In: Journal of Microelectromechanical Systems . (Journal of Microelectromechanical Systems, 1 June 2022, 31(3):435-441)
Subject
Language
English
ISSN
19410158
10577157
10577157