학술논문
The elemental composition mixing in a Mo/Si multilayer structure under overheating
Document Type
Conference Paper
Author
Source
In: Materials Today: Proceedings , 17th International Freik Conference on Physics and Technology of Thin Films and Nanosystems, ICPTTFN 2019. (Materials Today: Proceedings, 2019, 35:579-583)
Subject
Language
English
ISSN
22147853