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Enhancement of photosensitivity and stability of Sn-12 EUV resist by integrating photoactive nitrate anion

Document Type

Article

Author

Kang, Y.K.; Kim, H.; Lee, S.J.; Yeom, G.Y.; Kim, M.-G.; Oh, D.-S.; Yoon, Y.-H.; Kim, C.-J.; Hwang, C.-C.

Source

In: Applied Surface Science. (Applied Surface Science, 30 May 2024, 656)

Subject

Language

English

ISSN

01694332

Online Access

Full Text (ScienceDirect 종량제) Web of Science JCR 저널정보 Scopus Find it@PNU

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