학술논문
Effect of Vapor Phase Infiltration on Metal-Polymer Adhesion for Ultra-Low-k Dielectric Materials
Document Type
Article
Author
Source
In: IEEE Transactions on Device and Materials Reliability . (IEEE Transactions on Device and Materials Reliability, 1 December 2023, 23(4):564-570)
Subject
Language
English
ISSN
15582574
15304388
15304388