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Optimization and fabrication of MEMS based piezoelectric acoustic sensor for wide frequency range and high SPL acoustic application

Document Type

Article

Author

Kumar, A.; Varghese, A.; Elgaid, K.; Sharma, G.; K Sharma, G.; Janyani, V.; Yadav, R.P.; Kumar, M.; Prasad, M.

Source

In: Micro and Nanostructures. (Micro and Nanostructures, July 2023, 179)

Subject

Language

English

ISSN

27730123

Online Access

Full Text (ScienceDirect 종량제) Web of Science Scopus Find it@PNU

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