학술논문
Evolution of microstructure and properties of TiNbCrAlHfN films grown by unipolar and bipolar high-power impulse magnetron co-sputtering: The role of growth temperature and ion bombardment
Document Type
Article
Author
Source
In: Surface and Coatings Technology . (Surface and Coatings Technology, 25 April 2023, 459)
Subject
Language
English
ISSN
02578972