학술논문
Characterizations of Optimized Microshutter Arrays for Space Borne Observatory Applications
Document Type
Conference Paper
Author
Source
In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) , 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2022, 2022-January:584-587)
Subject
Language
English
ISSN
10846999