학술논문
Investigation of PEALD ZrO2 /La2 O3 -based high-k nanolaminates sandwiched between Al and Ti electrodes for MIM capacitors
Document Type
Article
Source
In: Journal of Materials Science: Materials in Electronics . (Journal of Materials Science: Materials in Electronics, June 2023, 34(16))
Subject
Language
English
ISSN
1573482X
09574522
09574522