학술논문
Mechanisms of elemental contamination in ion implantation equipment
Document Type
Conference
Author
Source
Proceedings of 11th International Conference on Ion Implantation Technology Ion implantation technology Ion Implantation Technology. Proceedings of the 11th International Conference on. :117-120 1996
Subject
Language
Abstract
This paper will survey 10 different mechanisms for producing elemental implanted and surface contaminants in implantation tools, and outline the tool design methods for avoiding the contaminants. These considerations also help us to improve the techniques used for surface analysis.