학술논문

Self-organized nonadiabatic optical near-field assisted sputtering for repairing surface scratches on Al2O3 ceramic substrate
Document Type
Conference
Source
CLEO/QELS: 2010 Laser Science to Photonic Applications Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on. :1-2 May, 2010
Subject
Components, Circuits, Devices and Systems
Photonics and Electrooptics
Communication, Networking and Broadcast Technologies
Fields, Waves and Electromagnetics
Signal Processing and Analysis
Engineered Materials, Dielectrics and Plasmas
Power, Energy and Industry Applications
Sputtering
Aluminum oxide
Optical scattering
Ceramics
Optical surface waves
Geometrical optics
Radio frequency
Surface waves
Surface emitting lasers
Nanophotonics
Language
Abstract
The scratches on the surface of Al 2 O 3 ceramics were repaired by optical near-field assisted sputtering with laser irradiation of 473-nm wavelength in a self-organized manner. Their average depth decreased from 3.2 nm to 0.79 nm.