학술논문
Self-organized nonadiabatic optical near-field assisted sputtering for repairing surface scratches on Al2O3 ceramic substrate
Document Type
Conference
Author
Source
CLEO/QELS: 2010 Laser Science to Photonic Applications Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on. :1-2 May, 2010
Subject
Language
Abstract
The scratches on the surface of Al 2 O 3 ceramics were repaired by optical near-field assisted sputtering with laser irradiation of 473-nm wavelength in a self-organized manner. Their average depth decreased from 3.2 nm to 0.79 nm.