부산대학교 도서관

The capacitance of a interdigitated microelectrode structure is considered. To determine this capacitance the method is proposed which is based on an analytical approach. In the structure, a system of two film electrodes is distinguished for which the potential distribution at a constant field is analytically determined. Using the potential distribution, the form factor of the structure is found, which, in its turn, is used to determine its capacitance. Based on the proposed method, the dependences of the form factor and the capacitance of the interdigitated microelectrode structure on the thickness and materials of the substrate and the finger width of microelectrodes are determined. The dependencies of the structure capacitance obtained by the proposed method and based on the lossless microstrip coupled lines model are compared.