학술논문
The effect of dihydride bonding on the electrical properties of a-Si:H (solar cells)
Document Type
Conference
Author
Source
Conference Record of the Twentieth IEEE Photovoltaic Specialists Conference Photovoltaic Specialists Conference, 1988., Conference Record of the Twentieth IEEE. :312-316 vol.1 1988
Subject
Language
Abstract
Thin films of a-Si:H have been prepared in an inductively coupled RF discharge of silane/hydrogen mixtures. The electron drift mobility, photo-to-dark conductivity ratio, and activation energy were found to vary with hydrogen dilution. FTIR spectroscopy reveals that SiH and SiH/sub 2/ bond concentrations increase with H/sub 2/ dilution. The change in the electrical properties observed with H/sub 2/ dilution can be explained by the increase in dihydride bonding concentration.ETX