학술논문

Gytrix, a novel axisymmetric quartz MEMS gyroscope for navigation purpose
Document Type
Conference
Source
2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Inertial Sensors and Systems (INERTIAL), 2022 IEEE International Symposium on. :1-4 May, 2022
Subject
General Topics for Engineers
Q-factor
Micromechanical devices
Vibrations
Temperature sensors
Microprocessors
Computer architecture
Stability analysis
Gyro
quartz
MEMS
Language
ISSN
2377-3480
Abstract
This paper reports a novel axisymmetric quartz MEMS gyroscope, named GYTRIX, able to work -for the first time to our knowledge- as a whole angle gyro. The proposed GYTRIX cell differs from the state of the art by the use of balanced vibration modes, naturally decoupled from the support, and a very simple and pure axisymmetric design, implementing an original principle of decoupling of the useful modes, which gives the resonators very high quality factors. As a proof of concept, the gyroscope presented is designed to operate in open-loop mode in order to facilitate the first characterizations of the cell. Thanks to its symmetry, isotropy and high quality factor, the gyroscope characteristics give up towards a theoretical angular random walk of 0.003°/√h and a bias stability better than 0.1°/h.