학술논문

GaN/GaAs(111)B grown by molecular beam epitaxy using hydrazine
Document Type
Conference
Source
Compound Semiconductors 1997. Proceedings of the IEEE Twenty-Fourth International Symposium on Compound Semiconductors Compound semiconductors 1997 Compound Semiconductors, 1997 IEEE International Symposium on. :15-23 1997
Subject
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Photonics and Electrooptics
Gallium nitride
Molecular beam epitaxial growth
Propellants
Gallium arsenide
Substrates
Nitrogen
Temperature distribution
Temperature measurement
Surface reconstruction
USA Councils
Language
Abstract
Layers of hexagonal GaN were grown on (111)B GaAs substrates by gas source molecular beam epitaxy (GSMBE) using hydrazine as a source of active nitrogen. Nitridation of an AlAs buffer layer was shown to produce a flat layer of AlN. GaN films grown on the AlN surface at growth temperatures above 700/spl deg/C exhibited quasi two-dimensional growth. Photoluminescence spectra of such GaN layers show narrow band-edge emission and no "yellow" defect band.