학술논문

Carbon nanotube-based SAW sensors
Document Type
Conference
Source
2013 Spanish Conference on Electron Devices Electron Devices (CDE), 2013 Spanish Conference on. :127-130 Feb, 2013
Subject
Fields, Waves and Electromagnetics
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Surface acoustic waves
Films
Carbon nanotubes
Surface acoustic wave devices
Frequency measurement
Carbon nantubes
SAW sensors
VOCs
Language
ISSN
2163-4971
Abstract
Surface acoustic wave (SAW) gas sensors based on the use of carbon nanotube (CNT) networks as sensitive layers have been investigated for the detection of atmospheric gas pollutants: volatile organic compounds (VOCs), NO 2 , CO, and H 2 • SAW sensor configuration consists of a delay line made on a piezoelectric substrate (ST -X cut quartz) and a sensitive layer (CNTs) deposited between the interdigital transducers (IDTs). CNT networks were fabricated by airbrushing single-walled-(SWCNTs) and double-walled- (DWCNTs) CNT dispersions onto quartz substrates. Among all the tested CNT materials and gases, only DWCNT -based SAW sensors were sensitive upon exposure to low concentration of octane and toluene, providing fast response and recovery times to these VOCs.