학술논문
Carbon nanotube-based SAW sensors
Document Type
Conference
Author
Source
2013 Spanish Conference on Electron Devices Electron Devices (CDE), 2013 Spanish Conference on. :127-130 Feb, 2013
Subject
Language
ISSN
2163-4971
Abstract
Surface acoustic wave (SAW) gas sensors based on the use of carbon nanotube (CNT) networks as sensitive layers have been investigated for the detection of atmospheric gas pollutants: volatile organic compounds (VOCs), NO 2 , CO, and H 2 • SAW sensor configuration consists of a delay line made on a piezoelectric substrate (ST -X cut quartz) and a sensitive layer (CNTs) deposited between the interdigital transducers (IDTs). CNT networks were fabricated by airbrushing single-walled-(SWCNTs) and double-walled- (DWCNTs) CNT dispersions onto quartz substrates. Among all the tested CNT materials and gases, only DWCNT -based SAW sensors were sensitive upon exposure to low concentration of octane and toluene, providing fast response and recovery times to these VOCs.