학술논문
Piezoelectric thin film platform for ultrasound transducer arrays
Document Type
Conference
Author
Source
2011 IEEE International Ultrasonics Symposium Ultrasonics Symposium (IUS), 2011 IEEE International. :196-199 Oct, 2011
Subject
Language
ISSN
1051-0117
1948-5727
1948-5719
1948-5727
1948-5719
Abstract
A piezoelectric thin film MEMs technology platform has been developed that enables processing of miniaturized ultrasound transducer arrays with only minimum 2 mask steps. The thin film ultrasound transducer arrays are operating in the frequency range of > 50 kHz up to > 10 MHz. A new class of ultrasound sensors for e.g. proximity sensing and imaging has been developed.