학술논문
Shape optimization for high quality factor flexural mechanical resonators operated in air
Document Type
Conference
Source
2016 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2016 Symposium on. :1-4 May, 2016
Subject
Language
Abstract
Resonator based sensing devices operated within a fluid medium often require maximal quality factors in order to enhance their performances. We present a tuning fork shape optimization based on an analytical approach, and identify the geometry with the lowest possible losses. We also report on the fabrication of a homemade tuning fork based on this optimization process, and experimental measurements show a quality factor of Q = 40800 in air at atmospheric pressure.