학술논문

Integrated Scheduling of Jobs, Tools, Machines, and Two Different Set of Transbots
Document Type
Periodical
Source
IEEE Transactions on Semiconductor Manufacturing IEEE Trans. Semicond. Manufact. Semiconductor Manufacturing, IEEE Transactions on. 37(1):27-37 Feb, 2024
Subject
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Job shop scheduling
Task analysis
Lithography
Semiconductor device manufacture
Dispatching
Constraint handling
Mobile robots
Robot task scheduling
reticle
lithography
simultaneous scheduling
constraint programming
Language
ISSN
0894-6507
1558-2345
Abstract
This paper studies simultaneous scheduling of production and material transfer that arises in the semiconductor photolithography area. In particular, the right reticle and right job both need to be present to process the job. Jobs are transferred by a material handling system that employees a fleet of vehicles. Reticles serving as an auxiliary resource are also transferred from one place to another by a different set of vehicles. This intricate scheduling challenge, encompassing jobs, reticles, machines, and two distinct sets of vehicles, is explored here for the first time. The paper introduces a multi-stage methodology that involves relaxation, a constructive heuristic, constraint programming, and a warm-start approach to address this complex problem.