학술논문
Magnetic thin-film inductors for monolithic integration with CMOS
Document Type
Conference
Author
Source
2015 IEEE International Electron Devices Meeting (IEDM) Electron Devices Meeting (IEDM), 2015 IEEE International. :11.4.1-11.4.4 Dec, 2015
Subject
Language
ISSN
2156-017X
Abstract
This paper presents the fabrication, design and electrical performance of magnetic thin-film inductors for monolithic integration with CMOS for DC-DC power conversion. Magnetic core inductors were fabricated using conventional CMOS processes to achieve peak inductance density of 290nH/mm2, quality factor 15 at 150MHz, current density exceeding 11 A/mm2 and coupling coefficient of 0.89 for coupled inductors.