학술논문
Laser-enhanced selective TiO2 deposition on Si
Document Type
Article
Source
Subject
*TITANIUM dioxide
*COLLOIDS
*THIN films
*MICROSTRUCTURE
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Language
ISSN
0257-8972
Abstract
A novel additive deposition method for the fabrication of TiO2 micro-patterns is demonstrated in this paper. Thin (<1 μm) and narrow (∼3 μm) titanium oxide/hydroxide and TiO2 deposits on Si wafers were realized using laser direct writing in gel films and solutions, respectively. By post-annealing the laser-written patterns (derived from gel) in a furnace, the deposits turned into stochiometric TiO2. The obtained micro-structures were characterized by using SEM/EDX and AFM. [Copyright &y& Elsevier]