학술논문
The relationships between sputter deposition conditions, grain size, and phase transformation temperatures in NiTi thin films.
Document Type
Article
Author
Source
Subject
*NICKEL-titanium alloys
*SPUTTER deposition
*PARTICLE size distribution
*PHASE transitions
*EFFECT of temperature on metals
*METALLIC thin films
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Language
ISSN
1359-6454
Abstract
Abstract: Sputter-deposited NiTi films on full 100mm wafers exhibit different phases, depending on the wafer region. Comprehensive characterization and analysis show that, unlike the common assumption, this effect is not related to the Ti/Ni stoichiometry. Instead, we show that the different phases are related to differences in grain size. Our results indicate the existence of a critical grain size of approximately 50–100nm, below which a significant inhibition of the martensitic transformation occurs. Further, we study the effect of deposition conditions and show that a desired uniform martensitic film can be achieved by decreasing the impact energy of the deposited atoms. [Copyright &y& Elsevier]