학술논문
Laser polishing and laser form correction of fused silica optics.
Document Type
Article
Author
Source
Subject
*LASER research
*OPTICAL properties of fused silica
*SURFACE roughness
*OPTICS
*GRINDING & polishing
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Language
ISSN
0933-5137
Abstract
With laser polishing, the roughness of ground glass surfaces can be significantly reduced. With process speeds up to 1 cm2/s independent of the processed surface shape, the resulting roughness is already sufficient for illumination optics. To further reduce the roughness, the polishing process itself will be optimized and moreover combined with a subsequent laser based form correction. Within this paper, results of laser polishing as well as laser form correction and combination of the two processes are presented and discussed. [ABSTRACT FROM AUTHOR]