학술논문

Atomic Layer Deposition of Tunnel Barriers for Superconducting Tunnel Junctions.
Document Type
Article
Source
Journal of Low Temperature Physics. Aug2014, Vol. 176 Issue 3/4, p237-242. 6p.
Subject
*SUPERCONDUCTING junction devices
*ATOMIC layer deposition
*GOLD films
*PARTICLE detectors
*NANOELECTROMECHANICAL systems
*THERMOMETERS
Language
ISSN
0022-2291
Abstract
We demonstrate a technique for creating high quality, large area tunnel junction barriers for normal-insulating-superconducting or superconducting-insulating-superconducting tunnel junctions. We use atomic layer deposition and an aluminum wetting layer to form a nanometer scale insulating barrier on gold films. Electronic transport measurements confirm that single-particle electron tunneling is the dominant transport mechanism, and the measured current-voltage curves demonstrate the viability of using these devices as self-calibrated, low temperature thermometers with a wide range of tunable parameters. This work represents a promising first step for superconducting technologies with deposited tunnel junction barriers. The potential for fabricating high performance junction refrigerators is also highlighted. [ABSTRACT FROM AUTHOR]