학술논문
Infrared ellipsometry study of the vibrational properties and the growth of hydrogenated amorphous silicon ultrathin films.
Document Type
Article
Author
Source
Subject
*AMORPHOUS substances
*THIN films
*SILICON
*INFRARED spectroscopy
*
*
*
Language
ISSN
0021-8979
Abstract
Provides information on a study concerning hydrogenated amorphous silicon ultrathin films deposited on glass substrates using infrared spectroscopic ellipsometry. Methodology; Results and discussion; Conclusions.