학술논문
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Academic Journal
Clerix, J.J.; Warad, L.; Hung, J.; Hody, H.; Van Roey, F.; Lorusso, G.; Koret, R.; Lee, W.T.; Shah, K.; Delabie, A.
In Applied Surface Science 30 July 2023 626
Conference
Veloso, A.; Demuynck, S.; Ercken, M.; Goethals, A. M.; Locorotondo, S.; Lazzarino, F.; Altamirano, E.; Huffman, C.; De Keersgieter, A.; Brus, S.; Demand, M.; Struyf, H.; De Backer, J.; Hermans, J.; Delvaux, C.; Baudemprez, B.; Vandeweyer, T.; Van Roey, F.; Baerts, C.; Goossens, D.; Dekkers, H.; Ong, P.; Heylen, N.; Kellens, K.; Volders, H.; Hikavyy, A.; Vrancken, C.; Rakowski, M.; Verhaegen, S.; Dusa, M.; Romijn, L.; Pigneret, C.; Van Dijk, A.; Schreutelkamp, R.; Cockburn, A.; Gravey, V.; Meiling, H.; Hultermans, B.; Lok, S.; Shah, K.; Rajagopalan, R.; Gelatos, J.; Richard, O.; Bender, H.; Vandenberghe, G.; Beyer, G. P.; Absil, P.; Hoffmann, T.; Ronse, K.; Biesemans, S.
2009 IEEE International Electron Devices Meeting (IEDM) Electron Devices Meeting (IEDM), 2009 IEEE International. :1-4 Dec, 2009
Conference
Veloso, A.; Demuynck, S.; Ercken, M.; Goethals, A. M.; Demand, M.; de Marneffe, J.-F.; Altamirano, E.; De Keersgieter, A.; Delvaux, C.; De Backer, J.; Brus, S.; Hermans, J.; Baudemprez, B.; Van Roey, F.; Lorusso, G. F.; Baerts, C.; Goossens, D.; Vrancken, C.; Mertens, S.; Versluijs, J. J.; Truffert, V.; Huffman, C.; Laidler, D.; Heylen, N.; Ong, P.; Parvais, B.; Rakowski, M.; Verhaegen, S.; Hikavyy, A.; Meiling, H.; Hultermans, B.; Romijn, L.; Pigneret, C.; Lok, S.; Van Dijk, A.; Shah, K.; Noori, A.; Gelatos, J.; Arghavani, R.; Schreutelkamp, R.; Boelen, P.; Richard, O.; Bender, H.; Witters, L.; Collaert, N.; Rooyackers, R.; Absil, P.; Lauwers, A.; Jurczak, M.; Hoffmann, T.; Vanhaelemeersch, S.; Cartuyvels, R.; Ronse, K.; Biesemans, S.
2008 IEEE International Electron Devices Meeting Electron Devices Meeting, 2008. IEDM 2008. IEEE International. :1-4 Dec, 2008
Academic Journal
In: Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics . (Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, 1 November 2018, 36(6):1DMMY)
Academic Journal
Lorusso, G.F.; Rutigliani, V.; Van Roey, F.; Moussa, A.; Charley, A.-L.; Sutani, T.; Ikota, M.; Ishimoto, T.; Koshihara, S.; Mack, C.; Naulleau, P.; Perera, C.; Constantoudis, V.
In: Journal of Micro/ Nanolithography, MEMS, and MOEMS . (Journal of Micro/ Nanolithography, MEMS, and MOEMS, 1 October 2018, 17(4))
Academic Journal
In: Microelectronic Engineering . (Microelectronic Engineering, 15 April 2018, 190:33-37)
Conference
Wöltgens, P.; Colina, A.; Rio, D.; Delorme, M.; Kovalevich, T.; Thiam, A.; van Roey, F.; Zografos, O.
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical and EUV Nanolithography XXXV. (Proceedings of SPIE - The International Society for Optical Engineering, 2022, 12051)
Conference
Kondo, T.; Ban, N.; Ebizuka, Y.; Toyoda, Y.; Yamada, Y.; Kashiwa, T.; Koike, H.; Shindo, H.; Charley, A.-L.; Saib, M.; Van Roey, F.; De Bisschop, P.; De Simone, D.; Beral, C.; Lorusso, G.F.
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV. (Proceedings of SPIE - The International Society for Optical Engineering, 2021, 11611)
Academic Journal
Goethals, A.-M.; Foubert, P.; Hosokawa, K.; van Roey, F.; Niroomand, A.; van den Heuvel, D.; Pollentier, I.
In: Journal of Photopolymer Science and Technology . (Journal of Photopolymer Science and Technology, 2012, 25(5):559-567)
Academic Journal
In: Journal of Photopolymer Science and Technology . (Journal of Photopolymer Science and Technology, 2011, 24(1):25-32)
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[AR] Van Roey, F.
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