학술논문
'학술논문'
에서 검색결과 65건 | 목록
1~10
Academic Journal
Choi, J.; Ryu, S.; Lee, S.; Kim, M.; Park, J.; Buck, P.; Koranne, S.; Tritchkov, A.; Bork, I.; Durvasula, B.; Gharat, S.; Rao, N.; Pai, R.
In: Journal of Micro/Nanopatterning, Materials and Metrology . (Journal of Micro/Nanopatterning, Materials and Metrology, 1 October 2021, 20(4))
Conference
Lafferty, N.; Saxena, S.; Tritchkov, A.; Kmiec, F.; Sturtevant, J.; Mizuuchi, K.; Ma, Y.; Zhang, X.; LaCour, P.
In: Proceedings of SPIE - The International Society for Optical Engineering , DTCO and Computational Patterning II. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12495)
Academic Journal
Guo, V.W.; Mansfield, S.; Zhuang, L.; Bailey, T.; Jiang, F.; Tritchkov, A.; Jayaram, S.; Sun, Y.; Word, J.; Zhang, X.
In: Journal of Micro/ Nanolithography, MEMS, and MOEMS . (Journal of Micro/ Nanolithography, MEMS, and MOEMS, 1 January 2019, 18(1))
Academic Journal
Ma, Y.; Lei, J.; Hong, L.; Andres Torres, J.; Word, J.; Tritchkov, A.; Lippincott, G.; Gupta, R.; Lafferty, N.; He, Y.; Fenger, G.; Bekaert, J.; Vanderberghe, G.
In: Journal of Micro/ Nanolithography, MEMS, and MOEMS . (Journal of Micro/ Nanolithography, MEMS, and MOEMS, 1 July 2015, 14(3))
Conference
Ma, Y.; Wu, R.; Lei, J.; Mizuuchi, K.; Tritchkov, A.; Jiang, F.; Hong, D.; Ali, R.; Hong, L.; Sun, Y.
In: Proceedings of SPIE - The International Society for Optical Engineering , Photomask Technology 2021. (Proceedings of SPIE - The International Society for Optical Engineering, 2021, 11855)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Photomask Technology 2021. (Proceedings of SPIE - The International Society for Optical Engineering, 2021, 11855)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical Microlithography XXXIV. (Proceedings of SPIE - The International Society for Optical Engineering, 2021, 11613)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical Microlithography XXXIV. (Proceedings of SPIE - The International Society for Optical Engineering, 2021, 11613)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Photomask Technology 2020. (Proceedings of SPIE - The International Society for Optical Engineering, 2020, 11518)
Computational lithography: Exhausting the resolution limits of 193-nm projection lithography systems
Academic Journal
Melville, D.O.S.; Rosenbluth, A.E.; Waechter, A.; Millstone, M.; Tirapu-Azpiroz, J.; Tian, K.; Lai, K.; Inoue, T.; Sakamoto, M.; Adam, K.; Tritchkov, A.
In: Journal of Vacuum Science and Technology B . (Journal of Vacuum Science and Technology B, November 2011, 29(6))
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제한된 항목
[AR] Tritchkov, A.
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