학술논문

발행년
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(예 : 2010-2015)
'학술논문' 에서 검색결과 65건 | 목록 1~10
Academic Journal
In: Journal of Micro/Nanopatterning, Materials and Metrology. (Journal of Micro/Nanopatterning, Materials and Metrology, 1 October 2021, 20(4))
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, DTCO and Computational Patterning II. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12495)
Academic Journal
In: Journal of Micro/ Nanolithography, MEMS, and MOEMS. (Journal of Micro/ Nanolithography, MEMS, and MOEMS, 1 January 2019, 18(1))
Academic Journal
In: Journal of Micro/ Nanolithography, MEMS, and MOEMS. (Journal of Micro/ Nanolithography, MEMS, and MOEMS, 1 July 2015, 14(3))
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, Photomask Technology 2021. (Proceedings of SPIE - The International Society for Optical Engineering, 2021, 11855)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, Photomask Technology 2021. (Proceedings of SPIE - The International Society for Optical Engineering, 2021, 11855)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, Optical Microlithography XXXIV. (Proceedings of SPIE - The International Society for Optical Engineering, 2021, 11613)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, Optical Microlithography XXXIV. (Proceedings of SPIE - The International Society for Optical Engineering, 2021, 11613)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, Photomask Technology 2020. (Proceedings of SPIE - The International Society for Optical Engineering, 2020, 11518)
Academic Journal
In: Journal of Vacuum Science and Technology B. (Journal of Vacuum Science and Technology B, November 2011, 29(6))
검색 결과 제한하기
제한된 항목
[AR] Tritchkov, A.
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