학술논문

발행년
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(예 : 2010-2015)
'학술논문' 에서 검색결과 9건 | 목록 1~10
Academic Journal
In: Microelectronic Engineering. (Microelectronic Engineering, April 2006, 83 4-9 SPEC. ISS.:951-955)
Academic Journal
In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. (Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 1999, 17(6):3335-3338)
Academic Journal
In: Doklady Akademii nauk SSSR. (Doklady Akademii nauk SSSR, July 1995, 343(3):340-342)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, Optical Microlithography XXIX. (Proceedings of SPIE - The International Society for Optical Engineering, 2016, 9780)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, Optical Microlithography XVIII. (Proceedings of SPIE - The International Society for Optical Engineering, 2005, 5754(PART 3):1478-1484)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, Optical Microlithography XVIII. (Proceedings of SPIE - The International Society for Optical Engineering, 2005, 5754(PART 1):476-487)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering. (Proceedings of SPIE - The International Society for Optical Engineering, 2001, 4345(I):10-18)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, Advances in Resist Technology and Processing XV. (Proceedings of SPIE - The International Society for Optical Engineering, 1998, 3333:997-1008)
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제한된 항목
[AR] Postnikov, S.V.
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