학술논문
'학술논문'
에서 검색결과 10건 | 목록
1~10
Academic Journal
Meli, L.; Petrillo, K.; De Silva, A.; Arnold, J.; Felix, N.; Robinson, C.; Briggs, B.; Matham, S.; Mignot, Y.; Shearer, J.; Hamieh, B.; Hontake, K.; Huli, L.; Lemley, C.; Hetzer, D.; Liu, E.; Akiteru, K.; Kawakami, S.; Shimoaoki, T.; Hashimoto, Y.; Ichinomiya, H.; Kai, A.; Tanaka, K.; Jain, A.; Choi, H.; Saville, B.; Lenox, C.
In: Journal of Micro/ Nanolithography, MEMS, and MOEMS . (Journal of Micro/ Nanolithography, MEMS, and MOEMS, 1 January 2019, 18(1))
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Advances in Patterning Materials and Processes XXXVII. (Proceedings of SPIE - The International Society for Optical Engineering, 2020, 11326)
Academic Journal
Hontake, K.; Nakada, A.; Kubota, H.; Wakizaka, Y.; Uchida, D.; Sugimura, M.; Furuya, A.; Toki, S.; Sasaki, J.; Kuribayashi, K.; Noda, T.; Chikuma, M.; Hagiwara, M.
In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers . (Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 8 September 2005, 44(9 A):6719-6725)
Academic Journal
In: Journal of Oleo Science . (Journal of Oleo Science, 2001, 50(2):103-108)
Conference
Meli, L.; Petrillo, K.; De Silva, A.; Arnold, J.; Felix, N.; Robinson, C.; Briggs, B.; Matham, S.; Mignot, Y.; Shearer, J.; Hamieh, B.; Hontake, K.; Huli, L.; Lemley, C.; Hetzer, D.; Liu, E.; Akiteru, K.; Kawakami, S.; Shimoaoki, T.; Hashimoto, Y.; Ichinomiya, H.; Kai, A.; Tanaka, K.; Jain, A.; Choi, H.; Saville, B.; Lenox, C.
In: Proceedings of SPIE - The International Society for Optical Engineering , Extreme Ultraviolet (EUV) Lithography IX. (Proceedings of SPIE - The International Society for Optical Engineering, 2018, 10583)
Conference
Hontake, K.; Huli, L.; Lemley, C.; Hetzer, D.; Liu, E.; Ko, A.; Kawakami, S.; Shimoaoki, T.; Hashimoto, Y.; Tanaka, K.; Petrillo, K.; Meli, L.; De Silva, A.; Xu, Y.; Felix, N.; Johnson, R.; Murray, C.; Hubbard, A.
In: Proceedings of SPIE - The International Society for Optical Engineering , International Conference on Extreme Ultraviolet Lithography 2017. (Proceedings of SPIE - The International Society for Optical Engineering, 2017, 10450)
Conference
Meli, L.; Petrillo, K.; De Silva, A.; Arnold, J.; Felix, N.; Johnson, R.; Murray, C.; Hubbard, A.; Durrant, D.; Hontake, K.; Huli, L.; Lemley, C.; Hetzer, D.; Kawakami, S.; Matsunaga, K.
In: Proceedings of SPIE - The International Society for Optical Engineering , Extreme Ultraviolet (EUV) Lithography VIII. (Proceedings of SPIE - The International Society for Optical Engineering, 2017, 10143)
Conference
Felix, N.; Corliss, D.; Petrillo, K.; Saulnier, N.; Xu, Y.; Meli, L.; Tang, H.; De Silva, A.; Hamieh, B.; Burkhardt, M.; Mignot, Y.; Johnson, R.; Robinson, C.; Breton, M.; Seshadri, I.; Dunn, D.; Sieg, S.; Miller, E.; Beique, G.; Labonte, A.; Sun, L.; Han, G.; Verduijn, E.; Han, E.; Kim, B.C.; Kim, J.; Hontake, K.; Huli, L.; Lemley, C.; Hetzer, D.; Kawakami, S.; Matsunaga, K.
In: Proceedings of SPIE - The International Society for Optical Engineering , Extreme Ultraviolet (EUV) Lithography VII. (Proceedings of SPIE - The International Society for Optical Engineering, 2016, 9776)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Advances in Patterning Materials and Processes XXXIII. (Proceedings of SPIE - The International Society for Optical Engineering, 2016, 9779)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Advances in Resist Materials and Processing Technology XXIV. (Proceedings of SPIE - The International Society for Optical Engineering, 2007, 6519(PART 2))
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[AR] Hontake, K.
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