학술논문
Patterning critical dimension control for advanced logic nodes
Document Type
Article
Author
Le-Gratiet, B.; De-Caunes, J.; Gatefait, M.; Lam, A.; Ostrovsky, A.; Planchot, J.; Farys, V.; Ducoté, J.; Mikolajczak, M.; Morin, V.; Chojnowski, N.; Sundermann, F.; Pelletier, A.; Bouyssou, R.; Monget, C.; Chapon, J.D.; Orlando, B.; Babaud, L.; Yesilada, E.; Szucs, A.; Michel, J.-C.; Bengoechea, O.R.; Gouraud, P.; Lapeyre, C.; Desvoivres, L.
Source
In: Journal of Micro/ Nanolithography, MEMS, and MOEMS . (Journal of Micro/ Nanolithography, MEMS, and MOEMS, 1 April 2015, 14(2))
Subject
Language
English
ISSN
19325134
19325150
19325150