학술논문
Effect of thermal annealing on the luminescent and structural properties of the SiOxCy thin films by organic catalytic chemical vapor deposition
Document Type
Article
Author
Source
In Thin Solid Films 15 November 2024 808
Subject
Language
ISSN
0040-6090
Abstract
Highlights •The silicon oxycarbide films were deposited using the tetra-ethyl orthosilicate.•Silicon oxycarbide present high emission intensity in white.•The composition of films changes with the thermal annealing temperature.•Photoluminescence of films was attributed to radiative defects related to C and O.