학술논문
Investigation of hafnium-aluminate alloys in view of integration as interpoly dielectrics of future Flash memories
Document Type
Article
Author
Molas, Gabriel; Bocquet, Marc; Buckley, Julien; Grampeix, Helen; Gély, Marc; Colonna, Jean-Philippe; Licitra, Christophe; Rochat, Névine; Veyront, Thomas; Garros, Xavier; Martin, François; Brianceau, Pierre; Vidal, Vincent; Bongiorno, Cosimo; Lombardo, Salvatore; Salvo, Barbara De; Deleonibus, Simon
Source
In Solid State Electronics 2007 51(11):1540-1546
Subject
Language
ISSN
0038-1101