학술논문
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Implementation of different cost functions for EUV mask optimization for next generation beyond 7nm.
Conference
Proceedings of SPIE; 1/20/2019, Vol. 10957, p1095712-1-1095712-8, 8p
Conference
Vivian Wei Guo; Fan Jiang; Rankin, Jed; Bork, Ingo; Tritchkov, Alexander; Wei, Alexander; Yuyang Sun; Jayaram, Srividya; Larry Zhuang; Xima Zhang; Bailey, Todd; Word, James
Proceedings of SPIE; 8/26/2018, Vol. 10810, p108100P-1-108100P-13, 13p
Conference
Vivian Wei Guo; Fan Jiang; Tritchkov, Alexander; Jayaram, Srividya; Mansfield, Scott; Zhuang, Larry; Yuyang Sun; Xima Zhang; Bailey, Todd
Proceedings of SPIE; 1/11/2018, Vol. 10583, p1-12, 12p
Academic Journal
Wei Guo, Vivian; Fan Jiang; Tritchkov, Alexander; Jayaram, Srividya; Mansfield, Scott; Zhuang, Larry; Yuyang Sun; Xima Zhang; Bailey, Todd; Word, James
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[AR] Xima Zhang
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