학술논문
'학술논문'
에서 검색결과 13건 | 목록
1~10
Academic Journal
Spenceley, A.; McCool, S.; Newsome, D.; Báez, A.; Barborak, J.R.; Blye, C.-J.; Halpenny, E.; Bricker, K.; Cahyadi, H.S.; Corrigan, K.; Hvenegaard, G.; King, D.M.; Leung, Y.-F.; Mandić, A.; Naidoo, R.; Sano, J.; Rüede, D.; Sarhan, M.; Santamaria, V.; Sousa, T.B.; Zschiegner, A.-K.
In: Parks . (Parks, March 2021, 27 Special Issue:103-118)
Academic Journal
In: Natur und Landschaft . (Natur und Landschaft, 2021, 96(8):377-384)
Conference
Proceedings of SPIE; Nov2005, Issue 1, p1629-1640, 12p
Academic Journal
In: MICRO . (MICRO, January 2004, 22(1):47-56)
Academic Journal
In: Proceedings of SPIE - The International Society for Optical Engineering . (Proceedings of SPIE - The International Society for Optical Engineering, 2001, 4346(2):1020-1028)
Periodical
In: Microlithography World . (Microlithography World, February 2002, 11(1):20-24)
Periodical
In: Solid State Technology . (Solid State Technology, August 2001, 44(8):63-64+66+68+70)
Conference
In: Proceedings of the Annual ISA Analysis Division Symposium , 57th Analysis Division Symposium 2012. (Proceedings of the Annual ISA Analysis Division Symposium, 2012, 489:157-171)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Microlithography XXI. (Proceedings of SPIE - The International Society for Optical Engineering, 2007, 6518(PART 3))
Conference
Ekberg, M.; Fosshaug, H.; Öström, T.; Bjömängen, P.; Utterbäck, T.; Skotte, P.-U.; Higley, J.; Ruede, D.; Kishkovich, O.
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical Microlithography XVII. (Proceedings of SPIE - The International Society for Optical Engineering, 2004, 5377(PART 3):1843-1857)
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제한된 항목
[AR] Rüede, D.
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