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MOCVD of aluminum oxide/hydroxide onto organic self-assembled monolayers

Document Type

Journal

Author

Wohlfart, P; Weiss, J; Kashammer, J; Kreiter, M; Winter, C; Fischer, R; Mittler-Neher, S

Source

CHEMICAL VAPOR DEPOSITION; AUG 1999, 5 4, p165-p170, 6p.

Subject

Language

English

ISSN

09481907

Online Access

Web of Science Scopus Find it@PNU

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