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Group III-nitrides and 3C-SiC for micro- and nanoelectromechanical resonators

Document Type

Text

Author

Foerster, Christian; Cimalla, Volker; Will, Florentina; Ambacher, Oliver; Brückner, Klemens; Stephan, Ralf; Hein, Matthias; Aperathitis, Elias

Source

Subject

Language

Online Access

Open Access (Europeana) Find it@PNU

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