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Fabrication of a strained is on sub-10-nm-thick SiGe-on-insulator virtual substrate

Document Type

Article

Author

Tezuka, T ; Sugiyama, N; Takagi, S

Source

In Materials Science & Engineering B 2002 89(1):360-363

Subject

Language

ISSN

0921-5107

Online Access

Full Text (ScienceDirect) Web of Science JCR 저널정보 Scopus Find it@PNU

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