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Ion-burst method for positive and negative ion species measurements

Document Type

Article

Author

Yoshimura, S ; Ichiki, R; Shindo, M; Kawai, Y

Source

In Thin Solid Films 2001 390(1):212-216

Subject

Language

ISSN

0040-6090

Online Access

Full Text (ScienceDirect) Web of Science JCR 저널정보 Scopus Find it@PNU

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