학술논문 – 부산대학교 도서관

학술논문

replay검색결과 돌아가기

search검색화면

4.0-nm-thick amorphous Nb–Ni film as a conducting diffusion barrier layer for integrating ferroelectric capacitor on Si

Document Type

Article

Author

Dai, X.H.; Guo, J.X.; Zhang, L.; Jia, D.M.; Qi, C.G.; Zhou, Y.; Li, X.H.; Shi, J.B.; Fu, Y.J.; Wang, Y.L.; Lou, J.Z.; Ma, L.X.; Zhao, H.D.; Liu, B.T.

Source

In Journal of Alloys and Compounds 5 October 2015 645:491-495

Subject

Language

ISSN

0925-8388

Online Access

Full Text (ScienceDirect) Web of Science JCR 저널정보 Scopus Find it@PNU

이메일