학술논문
Thermal stability of HVPE-grown (0001) α-Ga2 O3 on sapphire template under vacuum and atmospheric environments
Document Type
Article
Author
Source
In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films . (Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 1 July 2023, 41(4))
Subject
Language
English
ISSN
15208559
07342101
07342101