학술논문
First Jumps of a Silicon Microrobot with an Energy Storing Substrate Spring
Document Type
Conference Paper
Author
Source
In: 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 , 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021. (21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021, 20 June 2021, :349-352)
Subject
Language
English