학술논문
Stacked Nanowires FETs: Mechanical robustness evaluation for sub-7nm nodes
Document Type
Conference Paper
Author
Source
In: 2016 IEEE Silicon Nanoelectronics Workshop, SNW 2016 , 2016 IEEE Silicon Nanoelectronics Workshop, SNW 2016. (2016 IEEE Silicon Nanoelectronics Workshop, SNW 2016, 27 September 2016, :136-137)
Subject
Language
English