부산대학교 도서관

This paper presents an overview of our work on the design, fabrication, and integration of micro/nano-scale optical devices for VLSI photonic integration and sensor applications. The micro/nano-optical devices are designed to perform the functions of sensing and other functions such as switching, routing, and distributing optical signals on a chip scale or a board-scale. The integrated optical components include micro/nano-scale optical waveguides, switches, sensors, couplers, and multi-mode interference devices, constructed of building blocks such as nano-wires, micro-ring resonators, photonic crystals, and plasmonics made of polymer, silicon and semiconductor materials. The paper reports on some of the progresses and discusses the scientific and technological issues thereof.