학술논문

A super low noise V-band AlInAs/InGaAs HEMT processed by selective wet gate recess etching
Document Type
Conference
Source
1994 IEEE MTT-S International Microwave Symposium Digest (Cat. No.94CH3389-4) Microwave symposium Microwave Symposium Digest, 1994., IEEE MTT-S International. :645-648 vol.2 1994
Subject
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Fields, Waves and Electromagnetics
Aerospace
Communication, Networking and Broadcast Technologies
Photonics and Electrooptics
Indium gallium arsenide
HEMTs
MODFETs
Radio frequency
Wet etching
Noise figure
Passivation
Language
ISSN
0149-645X
Abstract
A 0.15 /spl mu/m T-shaped gate AlInAs/InGaAs high electron mobility transistor (HEMT) with excellent RF performances has been developed using a selective wet gate recess etching. An extremely low minimum noise figure (Fmin) of 0.9 dB with an associated gain (Ga) of 7.0 dB has been achieved at 60 GHz for a SiON-passivated device. This is the lowest value of Fmin ever reported for AlInAs/InGaAs HEMT with a passivation film.ETX