학술논문
Fabrication and Characterization of the Piezoelectric Microcantilever Integrated with PZT Thin-Film Microforce Sensor and Actuator
Document Type
Conference
Author
Source
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International. :2255-2258 Jun, 2007
Subject
Language
ISSN
2159-547X
2164-1641
2164-1641
Abstract
The paper presents a technology platform for micromanipulation systems based on the piezoelectric cantilevers integrated with PZT thin-film microforce sensors and actuators. Two novel piezoelectric microcantilevers with two-segment and bimoroh sol-gel PZT films were designed, fabricated by bulk micromachining and tested. The sensing and actuation capability of two-segment PZT microcantilevers as microforce sensors or actuators was characterized. The sensing performance of bimorph PZT microcantilevers was compared with the conventional unimorph microcantilever. The piezoelectric constant d31 of PZT films were measured without poling process.